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AWL seri wafer inspection system
AWL series wafer inspection system is both stable and security, able to secure and reliable transfer wafers, suitable for wafer inspection in front to
Detalji proizvoda

AWL 系列晶圆检查系统

AWL 系列晶圆检查系统的显微镜


AWL series wafer handler has AWL046, AWL068 two models, each can be used for 4/6 inch wafer detection, 6/8 inch wafer detection, its adaptation range wide, and with flexible, free-to-set inspection mode, fully compliant with ergonomic engineering design, operation comfortable and simple. AWL series wafer handler has AWL046, AWL068 two models, each can be used for 4/6 inch wafer detection, 6/8 inch wafer detection, its adaptation range wide, and with flexible, free-to-set inspection mode, fully compliant with ergonomic engineering design, operation comfortable and simple

AWL seriFaa'a'a'a'a'a'a'a'a'a'a'a'a'a'a'a'a'a'a'a'a'a'a'a'a'a'a'a'a

●360° makro lajɛ

360°宏观检查

AWL series wafer inspection system has a macro inspection arm, it can achieve a 360° rotation of crystal surface macro inspection, crystal back macro inspection 1, it's easier to find wounds and small dust. AWL series wafer inspection system has a macro inspection arm, it can achieve a 360° rotation of crystal surface macro inspection, crystal back macro inspection 1, it's easier to find wounds and small A lëu ba wafer ye tɛ̈n ye tɛ̈n ye tɛ̈n ye tɛ̈n ye tɛ̈n ye tɛ̈n ye tɛ̈n ye tɛ̈n ye. Crystal Tilt Angle ≤70°, Crystal Back 1 Tilt Angle ≤90°, Crystal Back 2 Tilt Angle ≤160°, ye baara kɛ rotation, Tilt Angle, a bɛ se ka tɛmɛ ka tɛmɛ ka tɛmɛ ka tɛmɛ ka tɛmɛ ka tɛmɛ ka tɛmɛ ka tɛmɛ ka tɛmɛ.

● Injiniɛr-Injiniɛr-Injiniɛr-Injiniɛr-Injiniɛr-Injiniɛr-Injiniɛr-Injiniɛr-Injiniɛr

晶圆检查系统的LCD显示屏

LCD display of the wafer inspection system, can provide a more intuitive visual experience to the operator, can show clearly the current inspection items and the order, debugging parameters at a glance. LCD display of the wafer inspection system, can provide a more intuitive visual experience to the operator, can show clearly the current inspection items and the order, debugging parameters at a glance.

Wafer inspection system's manual rapid release vacuum carrier table can improve the operator's comfort and productivity. Wafer inspection system's manual rapid release vacuum carrier table can improve the operator's comfort and productivity. Wafer inspection system's manual rapid release vacuum carrier table can improve the operator's comfort and productivity.

Wafer Defect Check Application Case

晶圆缺陷检查

晶圆缺陷检查

AWL seriTechnical Specifications of the Wafer Inspection System (Teknoloji)

Model

AWL046

AWL068

Wafer size (SEMI specification)

150mm/125mm/100mm

200mm/150mm

Minimum wafer thickness

150μm

180μm

Tip

Boks ye yic (SEMI Stad.25 ((26) -slot)

Kawɛl

1 Port

Cek setup mode

Full check / odd number check / pair number check / manual selection / manual selection / manual selection / manual selection / manual selection / manual selection / manual selection / manual selection / manual selection

Wafer scan nder box

Prepositioning wafer

Wafer tɛmɛ

Lɔ̈ɔ̈i ye cɔl /V ye cɔl non-contact, ye cɔl 0°, 90°, 180°, 270° ye cɔl

Cek Funksiɔn

Mikroskopi

Makro-check kristal

Crystal Back Makro Check 1

Crystal Back Makro Check 2

Mikroskop adaptif

SOPTOPMikroskop goldenMX68R

Kargo

6 inch four layer mechanical moving platform, low hand position X, Y direction coaxial adjustment; Wafer bearing table, lëu bï rot 360°; 228mm (X-direction) ×170mm (Y-direction)
170mmX170mm ; ne clutch handle, a lëu bï ya tɔ̈ɔ̈u bï ya tɔ̈ɔ̈u bï ya tɔ̈ɔ̈u bï ya tɔ̈ɔ̈u bï ya tɔ̈ɔ̈u bï ya tɔ̈ɔ̈u.

8 inch four layer mechanical moving platform, low hand position X, Y direction coaxial adjustment; Wafer bearing table, can be rotated 360°, moving distance 280mm (X direction) ×210mm (Y direction) observation range:
210mm×210mm ; Ne clutch handle, a lëu bï ya luui në tɛ̈n yenë yen rot looi në tɛ̈n yenë yen rot looi në tɛ̈n yenë yen rot looi në tɛ̈n yenë yen rot looi;

Power

1P/220V/16A

Käke vacuum

—70KPA

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Uspješna operacija!

Uspješna operacija!

Uspješna operacija!