

AWL series wafer handler has AWL046, AWL068 two models, each can be used for 4/6 inch wafer detection, 6/8 inch wafer detection, its adaptation range wide, and with flexible, free-to-set inspection mode, fully compliant with ergonomic engineering design, operation comfortable and simple. AWL series wafer handler has AWL046, AWL068 two models, each can be used for 4/6 inch wafer detection, 6/8 inch wafer detection, its adaptation range wide, and with flexible, free-to-set inspection mode, fully compliant with ergonomic engineering design, operation comfortable and simple
AWL seriFaa'a'a'a'a'a'a'a'a'a'a'a'a'a'a'a'a'a'a'a'a'a'a'a'a'a'a'a'a
●360° makro lajɛ

AWL series wafer inspection system has a macro inspection arm, it can achieve a 360° rotation of crystal surface macro inspection, crystal back macro inspection 1, it's easier to find wounds and small dust. AWL series wafer inspection system has a macro inspection arm, it can achieve a 360° rotation of crystal surface macro inspection, crystal back macro inspection 1, it's easier to find wounds and small A lëu ba wafer ye tɛ̈n ye tɛ̈n ye tɛ̈n ye tɛ̈n ye tɛ̈n ye tɛ̈n ye tɛ̈n ye tɛ̈n ye. Crystal Tilt Angle ≤70°, Crystal Back 1 Tilt Angle ≤90°, Crystal Back 2 Tilt Angle ≤160°, ye baara kɛ rotation, Tilt Angle, a bɛ se ka tɛmɛ ka tɛmɛ ka tɛmɛ ka tɛmɛ ka tɛmɛ ka tɛmɛ ka tɛmɛ ka tɛmɛ ka tɛmɛ.
● Injiniɛr-Injiniɛr-Injiniɛr-Injiniɛr-Injiniɛr-Injiniɛr-Injiniɛr-Injiniɛr-Injiniɛr

LCD display of the wafer inspection system, can provide a more intuitive visual experience to the operator, can show clearly the current inspection items and the order, debugging parameters at a glance. LCD display of the wafer inspection system, can provide a more intuitive visual experience to the operator, can show clearly the current inspection items and the order, debugging parameters at a glance.
Wafer inspection system's manual rapid release vacuum carrier table can improve the operator's comfort and productivity. Wafer inspection system's manual rapid release vacuum carrier table can improve the operator's comfort and productivity. Wafer inspection system's manual rapid release vacuum carrier table can improve the operator's comfort and productivity.
Wafer Defect Check Application Case


AWL seriTechnical Specifications of the Wafer Inspection System (Teknoloji)
Model |
AWL046 |
AWL068 |
|
Wafer size (SEMI specification) |
150mm/125mm/100mm |
200mm/150mm |
|
Minimum wafer thickness |
150μm |
180μm |
|
Tip |
Boks ye yic (SEMI Stad.25 ((26) -slot) |
||
Kawɛl |
1 Port |
||
Cek setup mode |
Full check / odd number check / pair number check / manual selection / manual selection / manual selection / manual selection / manual selection / manual selection / manual selection / manual selection / manual selection |
||
Wafer scan nder box |
● |
● |
|
Prepositioning wafer |
● |
● |
|
Wafer tɛmɛ |
Lɔ̈ɔ̈i ye cɔl /V ye cɔl non-contact, ye cɔl 0°, 90°, 180°, 270° ye cɔl |
||
Cek Funksiɔn |
Mikroskopi |
● |
● |
Makro-check kristal |
● |
● |
|
Crystal Back Makro Check 1 |
● |
● |
|
Crystal Back Makro Check 2 |
● |
● |
|
Mikroskop adaptif |
SOPTOPMikroskop goldenMX68R |
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Kargo |
6 inch four layer mechanical moving platform, low hand position X, Y direction coaxial adjustment; Wafer bearing table, lëu bï rot 360°; 228mm (X-direction) ×170mm (Y-direction) |
8 inch four layer mechanical moving platform, low hand position X, Y direction coaxial adjustment; Wafer bearing table, can be rotated 360°, moving distance 280mm (X direction) ×210mm (Y direction) observation range: |
|
Power |
1P/220V/16A |
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Käke vacuum |
—70KPA |
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